Spectrometer optical system, semiconductor inspection apparatus including the same and method of manufacturing semiconductor device using the apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorYasuhiro Hidaka
Life of this patent
Estimating the term…
Abstract
Provided are a spectrometer optical system and a semiconductor inspection apparatus, for reducing cost by allowing a wide field of view, high spatial resolution, and high wavelength resolution to be compatible with one another. The spectrometer optical system includes a masking having a slit, a first spherical mirror positioned to reflect light received from the slit, a second spherical mirror positioned to reflect the light reflected from the first spherical mirror, a dispersion element positioned to receive the light reflected from the second spherical mirror, and an image sensor configured to detect the light dispersed by the dispersion element according to wavelengths of the light.
Claims20
A spectrometer optical system comprising:
- a masking having a slit;
- a first spherical mirror positioned to reflect light received from the slit;
- a second spherical mirror positioned to reflect the light reflected from the first spherical mirror;
- a dispersion element positioned to receive the light reflected from the second spherical mirror;
- and
- an image sensor configured to detect the light dispersed by the dispersion element according to wavelengths of the light,
- wherein a center of curvature of the first spherical mirror and a center of curvature of the second spherical mirror are on an optical axis of the spectrometer optical system, and
- wherein the spectrometer optical system is configured that rays of the light reflected from the second spherical mirror are parallel at least at an aperture position, and the dispersion element is arranged at the aperture position.
A spectrometer optical system comprising:
- a masking having a slit having a line shape through hole;
- a spectroscope including a first spherical mirror, a second spherical mirror, and a dispersion element;
- and
- an image sensor configured to detect light dispersed by the spectroscope according to wavelengths of the light,
- wherein a center of curvature of the first spherical mirror and a center of curvature of the second spherical mirror are on an optical axis of the spectroscope, and
- wherein the spectroscope is configured that rays of the light reflected from the second spherical mirror are parallel at least at an aperture position, and the dispersion element is arranged at the aperture position.
A semiconductor inspection apparatus comprising:
- a light emitter configured to emit multicolor light to an object and to output the multicolor light reflected from the object;
- and
- a spectrometer optical system configured to receive the multicolor light output from the light emitter, the spectrometer optical system comprising a slit having a line shape through hole, a spectroscope including a first spherical mirror, a second spherical mirror, and a dispersion element, and an image sensor configured to detect light dispersed by the spectroscope according to wavelengths of the light,
- wherein a center of curvature of the first spherical mirror and a center of curvature of the second spherical mirror are on an optical axis of the spectroscope, and
- wherein the spectroscope is configured that rays of the light reflected from the second spherical mirror are parallel at least at an aperture position, that the dispersion element is arranged at the aperture position, and that a surface structure of the object is inspected based on a spectrum of the multicolor light, the spectrum being obtained from the spectrometer optical system.
Dependencies are inferred from the claim text.