Resonator and resonance device
AssigneeMurata Manufacturing Co., Ltd.
InventorsWakana Hirota, Toshio Nishimura
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AssigneeMurata Manufacturing Co., Ltd.
InventorsWakana Hirota, Toshio Nishimura
Estimating the term…
A resonator is provided that suppresses frequency variations with etching without decreasing the strength of vibration arms. The resonator includes a base portion, a first vibration portion extending from the base portion in a first direction and having a first width, and a second vibration portion extending from the base portion in the first direction with a first gap between the first and second vibration portions and having the first width. The first and second vibration portions perform out-of-plane bending vibration with opposite phases at a predetermined frequency. The predetermined frequency varies in accordance with the first width and the first gap. The ratio of the first gap to the first width is within a range that causes an absolute value of rates of variations in the predetermined frequency with respect to variations in the first width and in the first gap to be not more than about 100 ppm.
A resonator comprising:
A resonator comprising:
Dependencies are inferred from the claim text.