Lithium niobate single crystal substrate and method of producing the same
AssigneeSumitomo Metal Mining Co., Ltd.
InventorTomio Kajigaya
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AssigneeSumitomo Metal Mining Co., Ltd.
InventorTomio Kajigaya
Estimating the term…
To provide a lithium niobate (LN) substrate which allows treatment conditions regarding a temperature, a time, and the like to be easily managed and in which an in-plane distribution of a volume resistance value is very small, and a method of producing the same. A method of producing an LN substrate by using an LN single crystal grown by the Czochralski process, in which an LN single crystal having a Fe concentration of more than 1000 mass ppm and 2000 mass ppm or less in the single crystal and processed into a form of a substrate is buried in an Al powder or a mixed powder of Al and Al2O3, and heat-treated at a temperature of 550° C. or more and 600° C. or less, to produce a lithium niobate single crystal substrate having a volume resistivity controlled to be within a range of 1×108 Ω·cm or more to 1×1010 Ω·cm or less.
A method of producing a lithium niobate single crystal substrate by using a lithium niobate single crystal grown by the Czochralski process, wherein
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