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US 10,714,302 B2Granted
Ion beam irradiation apparatus
AssigneeNissin Ion Equipment Co., Ltd.
InventorTetsuro Yamamoto
Life of this patent
Estimating the term…
Abstract
An apparatus is provided. The apparatus includes a beam current measuring device and a first electrode. The beam current measuring device is retractably movable into an ion beam trajectory so as to measure an ion beam current. The first electrode is disposed immediately upstream of the beam current measuring device in an ion beam transport channel. The first electrode serves both as a suppressor electrode for repelling secondary electrons released from the beam current measuring device, back toward the beam current measuring device, and as a beam optical element other than the suppressor electrode.
Claims19
An apparatus comprising:
- a beam current measuring device configured to be retractably moved into an ion beam trajectory so as to measure an ion beam current;
- a first electrode disposed immediately upstream of the beam current measuring device in an ion beam transport channel, the first electrode being configured to serve both as a suppressor electrode for repelling secondary electrons released from the beam current measuring device, back toward the beam current measuring device while measuring the ion beam current, and as a beam optical element other than the suppressor electrode that controls the ion beam passing therethrough;
- a second electrode disposed immediately upstream of the first electrode in the ion beam transport channel;
- and
- an energy filter disposed downstream of the first electrode,
- wherein a voltage difference between a second voltage potential of the second electrode and a voltage potential of a target disposed in a processing chamber determines an acceleration and deceleration of the ion beam traveling in the ion beam transport channel toward a target position of the target, and
- a first voltage potential of the first electrode suppresses excessive convergence of the ion beam which would otherwise occur in the ion beam transport channel.
4 more elements
An apparatus comprising:
- a beam current measuring device configured to be retractably moved into an ion beam trajectory in an ion beam transport channel;
- a first electrode fixedly disposed immediately upstream of the beam current measuring device in the ion beam transport channel;
- a second electrode disposed immediately upstream of the first electrode in the ion beam transport channel;
- and
- an energy filter disposed downstream of the first electrode,
- wherein, in a state in which the beam current measuring device in the ion beam trajectory, the first electrode repels secondary electrons released from the beam current measuring device, back toward the beam current measuring device,
- in a state in which the beam current measuring device is not in the ion beam trajectory, the first electrode is a beam optical element that controls the ion beam passing therethrough,
- a voltage difference between a second voltage potential of the second electrode and a voltage potential of a target disposed in a processing chamber determines an acceleration and deceleration of the ion beam traveling in the ion beam transport channel toward a target position of the target, and
- a first voltage potential of the first electrode suppresses excessive convergence of the ion beam which would otherwise occur in the ion beam transport channel.
6 more elements
An ion beam irradiation apparatus for irradiating a target with an ion beam, the apparatus comprising:
- an ion source;
- an extraction electrode system that extracts ions from the ion source;
- a mass analyzing electromagnet provided downstream of the extraction electrode system;
- a mass analyzing slit provided downstream of the mass analyzing electromagnet;
- a beam current measuring device provided downstream of the mass analyzing slit and configured to be retractably moved into the ion beam;
- a first electrode fixedly disposed immediately upstream of the beam current measuring device;
- a second electrode disposed immediately upstream of the first electrode in the ion beam transport channel;
- and
- an energy filter provided downstream of the first electrode,
- wherein, in a state in which the beam current measuring device in the ion beam, the first electrode repels secondary electrons released from the beam current measuring device, back toward the beam current measuring device,
- in a state in which the beam current measuring device is not in the ion beam, the first electrode is a beam optical element that controls the ion beam passing therethrough,
- a voltage difference between a second voltage potential of the second electrode and a voltage potential of a target disposed in a processing chamber determines an acceleration and deceleration of the ion beam traveling in the ion beam transport channel toward a target position of the target, and
- a first voltage potential of the first electrode suppresses excessive convergence of the ion beam which would otherwise occur in the ion beam transport channel.
10 more elements
Dependencies are inferred from the claim text.