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US 10,714,295 B2Granted
Metal encapsulated photocathode electron emitter
AssigneeKLA-Tencor Corporation
InventorsGildardo R. Delgado, Katerina Ioakeimidi, Frances Hill, Gary V. Lopez Lopez, Rudy F. Garcia
Life of this patent
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Abstract
A photocathode structure, which can include one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal, has a protective film on an exterior surface. The protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof. The protective film can have a thickness from 1 nm to 10 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.
Claims19
An electron emitter comprising:
- a photocathode structure that includes one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal;
- a substrate;
- a protective film disposed on an exterior surface of the photocathode structure opposite the substrate, wherein the protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof;
- and
- a second protective film between the substrate and the photocathode structure, wherein the second protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof.
2 more elements
A method comprising:
- providing a substrate and a photocathode structure that includes one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal;
- depositing a protective film on an exterior surface of the photocathode structure opposite the substrate, wherein the protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof.
A method comprising:
- providing an electron emitter comprising:
- a photocathode structure including one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal;
- a substrate;
- a protective film disposed on an exterior surface of the photocathode structure opposite the substrate, wherein the protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof;
- and
- a second protective film between the substrate and the photocathode structure, wherein the second protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof;
- and
- generating an electron beam from the photocathode structure when photons are directed at the photocathode structure.
5 more elements
Dependencies are inferred from the claim text.