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US 10,714,294 B2Granted
Metal protective layer for electron emitters with a diffusion barrier
AssigneeKLA-Tencor Corporation
InventorsFrances Hill, Gildardo R. Delgado, Rudy F. Garcia, Gary V. Lopez Lopez, Michael E. Romero, Katerina Ioakeimidi, Zefram Marks
Life of this patent
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Abstract
An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.
Claims16
An apparatus comprising:
- an emitter, wherein the emitter has a diameter of 100 nm or less;
- a protective cap layer disposed on an exterior surface of the emitter, wherein the protective cap layer includes molybdenum;
- and
- a diffusion barrier between the emitter and the protective cap layer, wherein the diffusion barrier includes TiN, carbon, B4C, or boron.
1 more element
An apparatus comprising:
- an emitter, wherein the emitter has a diameter of 100 nm or less;
- a protective cap layer disposed on an exterior surface of the emitter, wherein the protective cap layer includes iridium;
- and
- a diffusion barrier between the emitter and the protective cap layer, wherein the diffusion barrier includes TiN, carbon, B4C, or boron.
1 more element
A method comprising:
- providing an emitter that includes a protective cap layer disposed on an exterior surface of the emitter, wherein the emitter has a diameter of 100 nm or less;
- applying an electric field to the emitter;
- generating an electron beam from the emitter;
- and
- pulsing the emitter thereby removing adsorbates from the emitter.
2 more elements
Dependencies are inferred from the claim text.