Pressure sensor and method for monitoring a pressure sensor
AssigneeEndress + Hauser GmbH + Co. KG
InventorsMax Jehle, Davide Parrotto, Thomas Uehlin
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AssigneeEndress + Hauser GmbH + Co. KG
InventorsMax Jehle, Davide Parrotto, Thomas Uehlin
Estimating the term…
A pressure sensor for determining a pressure measurement variable includes a housing, a pressure sensor element arranged in the housing, a lighting means arranged in the housing and a control/evaluation unit, the pressure sensor element having a semiconductor material and a measuring membrane, which has at least one integrated resistance element. When the measuring membrane experiences a pressure dependent deflection, the control/evaluation unit ascertains using the integrated resistance element, an electrical signal for determining the pressure measurement variable, wherein the lighting means optically excites the integrated resistance element, and the control/evaluation unit ascertains, based on a change of the electrical signal caused by the optical excitation, whether a malfunction of the pressure sensor is present.
A pressure sensor for determining a pressure measurement variable, the pressure sensor comprising:
A method for monitoring a pressure sensor, the method comprising:
Dependencies are inferred from the claim text.