High energy density multilayer battery cell with thermally processed components and method for making same

A method of producing a monolithically integrated high energy density solid-state battery device, the method comprising:

• forming a plurality of stacked monolithically integrated high energy density solid-state electrochemical cells sequentially or individually on a substrate in one or more deposition chambers, each monolithically integrated high energy density solid-state electrochemical cell of the plurality of stacked monolithically integrated high energy density solid-state electrochemical cells comprising:
• a first barrier layer,
• a cathode current collector formed over the first barrier layer,
• a cathode layer comprising an amorphous or crystalline charge carrier intercalated metal-1, metal-2, and metal-3 oxide or phosphate compound formed over the cathode current collector,
• a solid state anode layer configured for electrochemical insertion or ions plating during a charge process and a discharge process,
• an anode current collector formed over the solid state anode layer, and
• a second barrier layer configured to prevent oxidation of the solid state anode layer;
• annealing the plurality of stacked monolithically integrated high energy density solid-state electrochemical cells to a target temperature of greater than 600° C. for at least 60 minutes;
• and
• connecting the plurality of stacked monolithically integrated high energy density solid-state electrochemical cells electrically in series or in parallel, wherein the plurality of stacked monolithically integrated high energy density solid-state electrochemical cells are terminated using one of laser ablation, selective etching, or mechanical masking to form a monolithically integrated high energy density solid-state battery device.