Organic light-emitting diode device, manufacturing method thereof and evaporation equipment

A method for manufacturing an organic light-emitting diode device, wherein the device comprises at least two electron transport layers formed by an evaporation process, the method comprising:

• using evaporation equipment comprising:
• an evaporation material filling cavity;
• an evaporation material nozzle;
• and
• a rate control screen arranged between and in communication with the evaporation material filling cavity and the evaporation nozzle for controlling the flow rate of an evaporation material flowing from the evaporation material filling cavity to the evaporation material nozzle to control an evaporation rate of the evaporation material, the rate control screen comprising at least two connected rate control sub-screens of different types having different evaporation rates;
• wherein the rate control screen is moveable relative to the evaporation material nozzle to change the rate control sub-screen in alignment with the evaporation material nozzle;
• and
• wherein in a direction of relative movement of the rate control screen, the evaporation rates of the at least two rate control sub-screens of different types decrease from each sub-screen to each subsequent
• providing a host material or a guest material in the evaporation material cavity as the evaporation material according to a predetermined mass ratio between the host material and the guest material for each electron transport layer;
• moving the rate control screen to align one of the rate control sub-screens with the evaporation material nozzle;
• and
• evaporating the evaporation material to form each electron transport layer in order.