US 10,707,404 B2 · Piezoelectric element

Abstract

In a piezoelectric element, internal stress generated in an inactive portion at the time of sintering when a piezoelectric element is fabricated or stress applied from the outside to the inactive portion is absorbed by a recess of a lower surface of a first through hole conductor and a recess of an upper surface of a second through hole conductor. Accordingly, for example, deformation, rupture, or the like of the through hole conductor is prevented, and conduction failure or disconnection of an electrode layer or a through hole conductor is prevented. Further, in the inactive portion, since a protrusion of the piezoelectric layer enters the recess of the through hole conductor, a holding force of the piezoelectric layer with respect to the through hole conductor increases, and deformation of the through hole conductor is prevented or obstructed.

Claims18

Dependent claims

A piezoelectric element comprising a laminated body having electrode layers and piezoelectric layers laminated alternately,

wherein:
the laminated body includes a first through hole conductor penetrating a first piezoelectric layer laminated on one surface of an electrode layer, and a second through hole conductor penetrating a second piezoelectric layer laminated on a second surface of the electrode layer, the first surface and the second surface are opposing surfaces;
the first through hole conductor includes a first recess on a first end surface facing the second piezoelectric layer and the second piezoelectric layer includes a first protrusion entering the first recess;
and
the second through hole conductor includes a second recess on a second end surface facing the first piezoelectric layer, and the first piezoelectric layer includes a second protrusion entering the second recess.

2 more elements

Dependencies are inferred from the claim text.

Piezoelectric element

Life of this patent

Piezoelectric element

Life of this patent

Abstract

Claims18