Semiconductor device manufacturing method and semiconductor device
AssigneeShindengen Electric Manufacturing Co., Ltd.
InventorsAtsushi Ogasawara, Fumihiro Homma
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Abstract
A semiconductor device manufacturing method includes: a pretreatment step of performing a hydrophobic treatment on a first exposed region of an exposed surface, an n-type semiconductor layer being exposed from the first exposed region, and a pn junction being exposed from the exposed surface; an impurity supplying step of supplying an n-type impurity to the first exposed region; a channel stopper forming step of irradiating the first exposed region with a laser beam to introduce the n-type impurity into the n-type semiconductor layer, thus forming a channel stopper; and a glass layer forming step of forming a glass layer using a glass composition so as to cover the exposed surface.
Claims11
A semiconductor device manufacturing method comprising:
- a semiconductor substrate preparing step of preparing a semiconductor substrate having an exposed surface where a pn junction is exposed, the pn junction being formed at a junction portion between a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type opposite to the first conductivity type, the exposed surface having
- a first exposed region where the first semiconductor layer is exposed, and
- a second exposed region where the second semiconductor layer is exposed;
- a pretreatment step of performing a hydrophobic treatment only on the first exposed region of the exposed surface;
- an impurity supplying step of supplying an impurity of the first conductivity type to the first exposed region;
- a channel stopper forming step of irradiating the first exposed region with a laser beam to introduce the impurity of the first conductivity type into the first semiconductor layer, thus forming a channel stopper;
- and
- a glass layer forming step of forming a glass layer using a glass composition so as to cover the exposed surface.
Dependencies are inferred from the claim text.