US 10,707,256 B2 · Imaging device and method of manufacturing imaging device

Abstract

To reduce the influence of noise in the imaging device configured with the plurality of semiconductor chips. A first semiconductor chip includes a signal input transistor in which an input signal which is a signal corresponding to incident light is input to a control terminal, a reference input transistor which forms a differential pair along with the signal input transistor and in which a reference signal is input to a control terminal, a first signal line which delivers a change in a current flowing in one of the signal input transistor and the reference input transistor as a result of comparison between the input signal and the reference signal when the current is changed in accordance with a difference between the input signal and the reference signal, and a first pad which is electrically connected to the first signal line. A second semiconductor chip includes a processing circuit which processes the result of the comparison, a second signal line which is electrically connected to the processing circuit and delivers the result of the comparison to the processing circuit, and a second pad which is electrically connected to the second signal line and the first pad.

Claims25

Dependent claims

An imaging device comprising:

a first substrate including:
a photoelectric converter configured to output a pixel signal;
a transfer transistor coupled to the photoelectric converter;
a floating diffusion configured to receive the pixel signal via the transfer transistor;
a reset transistor;
and
a first portion of a comparator, the first portion of the comparator including:
a first differential transistor configured to receive a reference signal;
and
a second differential transistor configured to receive an output signal based on the pixel signal;
a second substrate bonded to the first substrate, the second substrate including:
a second portion of the comparator;
an element isolation region disposed between the photoelectric converter and the reset transistor;
a first control transistor coupled to the first differential transistor, the second differential transistor and a first line supplied with a ground voltage;
and
a second control transistor;
wherein a gate of the second control transistor is connected to a gate of the first control transistor.

14 more elements

Dependencies are inferred from the claim text.

Imaging device and method of manufacturing imaging device

Life of this patent

Imaging device and method of manufacturing imaging device

Life of this patent

Abstract

Claims25