Package structure and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Chiang Wu, Chen-Hua Yu, Kuo-Chung Yee
Life of this patent
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Abstract
A package structure and the method thereof are provided. The package structure includes a conductive plate, a semiconductor die, a molding compound, and antenna elements. The conductive plate has a first surface, a second surface and a sidewall connecting the first surface and the second surface. The semiconductor die is located on the second surface of the conductive plate. The molding compound laterally encapsulates the semiconductor die and covers the sidewall and a portion of the second surface exposed by the semiconductor die, wherein the first surface of the conductive plate is coplanar with a surface of the molding compound. The antenna elements are located over the first surface of the conductive plate.
Claims20
A package structure, comprising:
- a conductive plate, having a first surface, a second surface and a sidewall connecting the first surface and the second surface;
- a semiconductor die, located on the second surface of the conductive plate;
- a molding compound, laterally encapsulating the semiconductor die and covering the sidewall and a portion of the second surface exposed by the semiconductor die, wherein the first surface of the conductive plate is coplanar with a surface of the molding compound;
- and
- antenna elements, located over the first surface of the conductive plate.
A package structure, comprising:
- at least one semiconductor die, having a front surface and a rear surface opposite to the front surface;
- a connecting film, located on the rear surface;
- a conductive plate, located on the connecting film;
- a molding compound, encapsulating the at least one semiconductor die and the connecting film, wherein a first surface of the molding compound is coplanar with the front surface of the at least one semiconductor die, and a second surface of the molding compound is coplanar with a third surface of the conductive plate, wherein along a stacking direction of the at least one semiconductor die, the connecting film and the conductive plate, the first surface is opposite to the second surface, the third surface is opposite to a fourth surface, and the fourth surface is closer to the at least one semiconductor die than the third surface is;
- a first redistribution circuit structure;
- located on the first surface of the molding compound;
- an encapsulant, located on the third surface of the conductive plate;
- and
- antenna elements, located on the encapsulation, wherein the encapsulation is located between the antenna elements and the third surface of the conductive plate.
A method of manufacturing a package structure, comprising:
- forming a conductive plate having a first surface, a second surface and a sidewall connecting the first surface and the second surface;
- disposing a semiconductor die on the second surface of the conductive plate;
- laterally encapsulating the semiconductor die in a molding compound, the sidewall and a portion of the second surface exposed by the semiconductor die being covered by the molding compound, and the first surface being coplanar to a surface of the molding compound;
- and
- forming antenna elements over the first surface of the conductive plate, the conductive plate is located between the semiconductor die and the conductive plate.
Dependencies are inferred from the claim text.