Methods and apparatus for semiconductor sample workflow
AssigneeFEI Company
InventorsKonstantin Balashov, Thomas G. Miller
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Abstract
Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.
Claims10
An apparatus comprising:
- a body dimensioned to correspond to a diameter of a semiconductor wafer;
- and
- a plurality of niches formed in a surface of the body, each niche of the plurality of niches configured to receive a test sample taken from the semiconductor wafer.
Dependencies are inferred from the claim text.