Systems and methods for dicing samples using a bessel beam matrix
AssigneeThe Chinese University of Hong Kong
InventorsShih-Chi Chen, Hiu Hung Lee, Dapeng Zhang, Erxuan Zhao, Yina Chang, Dihan Chen
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Abstract
Systems and methods for dicing a sample by a Bessel beam matrix are disclosed. The method for dicing a sample by a Bessel beam matrix may comprise generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample; controlling a focus position of each Bessel beam in the generated Bessel beam matrix; and focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing.
Claims11
A system for dicing a sample by a Bessel beam matrix, comprising:
- a Bessel beam matrix generator for generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample;
- a controller for controlling a focus position of each Bessel beam in the generated Bessel beam matrix;
- and
- a focuser for focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing,
- wherein the focuser is further configured to:
- shift one or more of the Bessel beams in the Bessel beam matrix along a column direction and a row direction through the sample to dice the sample;
- and
- shift independently one or more of the Bessel beams in the Bessel beam matrix along an axial direction through the sample to dice the sample.
The system according to 1, wherein the controller is further configured to control a focal depth and an intensity distribution along the individual Bessel beams in the Bessel beam matrix independently.
A system for dicing a sample by a Bessel beam matrix, comprising:
- a laser source for irradiating a Gaussian beam;
- a spatial light modulator for generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form from the irradiated Gaussian beam, according to a predetermined dicing layout of the sample;
- a beam splitter for receiving the generated Bessel beam matrix and splitting the Bessel beam matrix into a plurality of Bessel beam sub-matrices;
- a beam combiner for recombining the plurality Bessel beam sub-matrices;
- and
- a focuser for focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing, wherein the system further comprises a plurality of electrically tunable lens (ETL) for controlling a focal depth of each Bessel beam in the generated Bessel beam matrix, and
- wherein the focus positions in a focal plane and an intensity distribution of each Bessel beam are controlled by the spatial light modulator, so that the Bessel beams with the controlled focus positions, focal depth and intensity distribution are focused by the focuser for dicing the sample.
Dependencies are inferred from the claim text.