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US 10,707,051 B2Granted
Cathodoluminescence optical hub
AssigneeGatan, Inc.
InventorsJohn Andrew Hunt, Michael Bertilson, Tom Worsley
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AssigneeGatan, Inc.
InventorsJohn Andrew Hunt, Michael Bertilson, Tom Worsley
Estimating the term…
An apparatus for collection, distribution, and analysis of cathodoluminescence (CL) and other light signals in an electron microscope is provided. The optical hub, utilizing a linear-translating fold-mirror and mounted to the electron microscope, is used to receive essentially collimated light collected from a collection-mirror and efficiently route the collected light to a plurality of light-analysis instruments. The linear-translating fold-mirror can provide fine positional alignment of the light signal, and in an aspect of the invention can be used to select or scan a portion of the collected light-pattern into an optical slit or aperture. In one aspect, the optical hub includes a light filter mechanism that can track the movement of the fold-mirror. In an aspect, the optical hub also controls the positioning of the collection-mirror in proximity to the specimen being analyzed.
An apparatus for collection and analysis of light in an electron microscope comprising:
The apparatus of clam 4, wherein said second linear actuator comprises a second lead screw and second electric motor.
Dependencies are inferred from the claim text.