Measuring device and measuring method

A measuring method in a measuring device for measuring a sample by emitting a charged particle beam, the measuring device including a particle source configured to emit the charged particle beam;

• an electronic lens configured to focus the charged particle beam;
• a detector configured to detect a signal generated from the sample irradiated with the charged particle beam;
• a stage capable of moving with the sample mounted thereon;
• an electrostatic chuck attached to the stage that fixes the sample, the stage and the electrostatic chuck being made of different materials;
• a sensor configured to measure environment of the measuring device;
• and a control device configured to control the measuring device overall and including a control module, the measuring method comprising:
• a first step in which the control module calculates a height estimation value indicating an estimated value of the height of the sample at a measurement position;
• a second step in which the control module calculates a correction value reflecting an environmental change based on the measurement position and an amount of the environmental change measured by the sensor;
• a third step in which the control module corrects the height estimation value based on the correction value;
• a fourth step in which the control module sets a control value for controlling a focus adjustment using the electronic lens based on the corrected height estimation value;
• and
• a fifth step in which the control module detects the signal by irradiating the sample with the charged particle beam set to a predetermined focus value by the electronic lens to which the control value is set, wherein
• the control device retains parameter information representing a distribution of distortions caused by a stress of a connecting portion of the stage and the electrostatic chuck due to a difference in materials thereof for calculating the correction value, and
• in the second step, the control module calculates the correction value of the measurement position of the sample based on the measurement position of the sample, the amount of environmental change measured by the sensor, and the parameter information.