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US 10,707,039 B2Granted
Current handling in legs and anchors of RF-switch
AssigneeCavendish Kinetics, Inc.
InventorsRobertus Petrus Van Kampen, Richard L. Knipe
Life of this patent
Estimating the term…
Abstract
The present invention generally relates to a mechanism for making the anchor of the MEMS switch more robust for current handling. The disclosure includes a modified leg and anchor design that allows for larger currents to be handled by the MEMS switch.
Claims20
A MEMS device, comprising:
- a substrate having a plurality of electrodes disposed therein, wherein the plurality of electrodes include at least an anchor electrode, a pull-down electrode and an RF electrode;
- an insulating layer disposed over the substrate and the pull-down electrode;
- a switching element movable from a position spaced a first distance from the RF electrode and a second distance from the RF electrode that is different from the first distance, wherein the switching element includes:
- a bottom layer;
- a top layer;
- and
- a plurality of vias connecting the bottom layer to the top layer, wherein the switching element includes a first anchor portion, a first leg portion and a bridge portion, wherein the plurality of vias are disposed in the first anchor portion and the bridge portion, wherein the first anchor portion is coupled to the anchor electrode.
4 more elements
A MEMS device comprising:
- a substrate having a plurality of electrodes disposed therein, wherein the plurality of electrodes include at least an anchor electrode, a pull-down electrode and an RF electrode;
- an anchor contact disposed on the anchor electrode;
- an insulating layer disposed over the substrate and the pull-down electrode;
- a switching element movable from a position spaced a first distance from the RF electrode and a second distance from the RF electrode that is different from the first distance, wherein the switching element includes:
- a bottom layer;
- a top layer;
- and
- a plurality of vias connecting the bottom layer to the top layer, wherein the switching element is enclosed in a cavity;
- and
- a cavity sidewall in contact with the bottom layer, the top layer, and the anchor contact, wherein the cavity sidewall is electrically coupled to the bottom layer, the top layer, and the anchor contact.
7 more elements
A MEMS device, comprising:
- a substrate having a plurality of electrodes disposed therein, wherein the plurality of electrodes include at least an anchor electrode, a pull-down electrode and an RF electrode;
- an anchor contact disposed on the anchor electrode;
- an insulating layer disposed over the substrate and the pull-down electrode;
- a switching element movable from a position spaced a first distance from the RF electrode and a second distance from the RF electrode that is different from the first distance, wherein the switching element includes:
- a bottom layer;
- a top layer;
- and
- a plurality of vias connecting the bottom layer to the top layer, wherein the switching element includes a first anchor portion, a first leg portion and a bridge portion, wherein the plurality of vias are disposed in the first anchor portion and the bridge portion, wherein the anchor portion is coupled to the anchor electrode;
- and
- a cavity sidewall in contact with the bottom layer, the top layer, and the anchor contact, wherein the cavity sidewall is electrically coupled to the bottom layer, the top layer, and the anchor contact.
7 more elements
Dependencies are inferred from the claim text.