Inspection method
AssigneeKoh Young Technology Inc.
InventorSoo-Young Cho
Life of this patent
Estimating the term…
Abstract
To inspect a board, first, a measurement area is set on the board and a reference data of the measurement area is obtained. Then, a measurement data of the measurement area is obtained per colors, and a lighting condition is set using the reference data of the measurement area and the measurement data obtained per colors. Next, a feature object in the measurement area is set, and a distortion quantity between the reference data and the measurement data is obtained by comparing the reference data corresponding to the feature object and the measurement data corresponding to the feature object obtained under the lighting condition. Then, an inspection area is set by compensating the distortion quantity. Therefore, it is possible to compensate the distortion and set precisely the inspection area.
Claims12
An inspection method comprising:
- setting a measurement area on a board;
- setting a feature object for the measurement area;
- irradiating lights having different lighting conditions from each other toward the measurement area;
- obtaining measurement data of the measurement area under each of the lighting conditions;
- performing a lighting condition setting operation based on the measurement data of the measurement area obtained under each of the lighting conditions to select one lighting condition among the lighting conditions, the lighting condition setting operation comprising:
- obtaining a gray scale of an area including the feature object and a gray scale of an area not including the feature object with respect to each measurement data obtained under each of the lighting conditions;
- obtaining a gray scale difference between the gray scale of the area including the feature object and the gray scale of the area not including the feature object with respect to each measurement data;
- comparing the gray scale differences of the area including the feature object and the gray scale of the area not including the feature object with each other to select one gray scale difference which is a largest of the gray scale differences;
- and
- selecting the one lighting condition among the lighting conditions, the one lighting condition corresponding to the one gray scale difference;
- obtaining a distortion quantity by comparing a measurement data of the measurement area under the one lighting condition and a reference data of the measurement area;
- compensating the measurement data of the measurement area under the one lighting condition using the distortion quantity to obtain a compensated measurement data;
- and
- setting an inspection area corresponding to the compensated measurement data in the measurement area.
An inspection method comprising:
- setting a reference area including a feature object and another reference area not including a feature object with respect to a measurement area;
- setting a measuring area corresponding to the reference area and another measuring area corresponding to the another reference area with respect to the measurement area;
- irradiating lights having different lighting conditions from each other toward the measurement area;
- obtaining measurement data of the measurement area under each of the lighting conditions;
- performing a lighting condition setting operation based on the measurement data of the measurement area obtained under each of the lighting conditions to select one lighting condition among the lighting conditions, the lighting condition setting operation comprising:
- obtaining a gray scale of an area including the feature object and a gray scale of an area not including the feature object with respect to each measurement data obtained under each of the lighting conditions;
- obtaining a gray scale difference between the gray scale of the area including the feature object and the gray scale of the area not including the feature object with respect to each measurement data;
- comparing the gray scale differences of the area including the feature object and the gray scale of the area not including the feature object with each other to select one gray scale difference which is a largest of the gray scale differences;
- and
- selecting the one lighting condition among the lighting conditions based on the selected one gray scale difference.
Dependencies are inferred from the claim text.