Generative adversarial networks for generating physical design layout patterns of integrated multi-layers

A computer program product, the computer program product comprising a non-transitory computer readable storage medium having program instructions embodied therewith, the program instructions executable by at least one computing device to cause the at least one computing device to perform steps of:

• selecting as training data one or more physical design layout patterns of integrated multi-layers for features in at least two layers of a given patterned structure;
• converting the physical design layout patterns into three-dimensional arrays, a given three-dimensional array comprising a set of two-dimensional arrays each representing features of one layer of the at least two layers in a given one of the physical design layout patterns;
• training, utilizing the three-dimensional arrays, a generative adversarial network (GAN) comprising a discriminator neural network and a generator neural network;
• and
• generating one or more synthetic three-dimensional arrays utilizing the generator neural network of the trained GAN, a given one of the synthetic three-dimensional arrays comprising a set of two-dimensional arrays each representing features for one new layer of at least two new layers of a new physical design layout pattern.

An apparatus comprising:

• a memory;
• and
• at least one processor coupled to the memory and configured for:
• selecting one or more physical design layout patterns of integrated multi-layers for features in at least two layers of a given patterned structure;
• converting the physical design layout patterns of integrated multi-layers into three-dimensional arrays, a given three-dimensional array comprising a set of two-dimensional arrays each representing features of one layer of the at least two layers in a given one of the physical design layout patterns;
• training, utilizing the three-dimensional arrays, a generative adversarial network (GAN) comprising a discriminator neural network and a generator neural network;
• and
• generating one or more synthetic three-dimensional arrays utilizing the generator neural network of the trained GAN, a given one of the synthetic three-dimensional arrays comprising a set of two-dimensional arrays each representing features for one new layer of at least two new layers of a new physical design layout pattern.