Fluid control unit and program storage media for fluid control unit

A program storage media for a fluid control unit that stores programs used for the fluid control unit comprising:

• a flow rate measurement part that measures a flow rate of a fluid flowing in a flow channel and a fluid control valve provided in the flow channel, and that provides a computer with a function as a valve aperture operation amount output part that outputs a valve aperture operation amount signal indicating a valve aperture operation amount of the fluid control valve obtained based on a deviation between a previously preset flow rate and a measured flow rate of the flow rate measurement part and a previously set control coefficient, wherein
• the control coefficient for a stable state in which the measured flow rate is stable and the control coefficient for a transitional state in which the measured flow rate fluctuates due to fluctuation of the preset flow rate are set to moderate the valve aperture operation amount according to the deviation more in the transitional state than in the stable state, and
• at a switching time when the stable state is switched to the transitional state or before a predetermined time period passes after the switching time, the valve aperture operation amount output part outputs a valve aperture operation amount output signal for the switching time indicating a valve aperture operation amount for the switching time that is calculated based on a plurality of valve aperture operation amounts output at a plurality of timings in the stable state prior to the switching time.

A fluid control unit comprising:

• a flow rate measurement part that measures a flow rate of a fluid flowing in a flow channel,
• a fluid control valve that is arranged in the flow channel, and
• a valve aperture operation amount output part that outputs a valve aperture operation amount signal indicating a valve aperture operation amount of the fluid control valve obtained based on a deviation between a previously preset flow rate and a measured flow rate of the flow rate measurement part and a previously set control coefficient, wherein
• the control coefficient for a stable state in which the measured flow rate is stable and the control coefficient for a transitional state in which the measured flow rate fluctuates due to fluctuation of the preset flow rate are set respectively, and
• at a switching time when the stable state is switched to the transitional state or before a predetermined time period passes after the switching time, the valve aperture operation amount output part outputs a valve aperture operation amount output signal for the switching time indicating a valve aperture operation amount for the switching time that is calculated based on a plurality of valve aperture operation amounts output at a plurality of timings in the stable state prior to the switching time.