Quarter wave light splitting
AssigneeApplied Materials, Inc.
InventorsChristopher Dennis Bencher, Joseph R. Johnson, David Markle, Mehdi Vaez-Iravani
Life of this patent
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Abstract
Embodiments of the present disclosure provide methods for producing images on substrates. The method includes providing a p-polarization beam to a first mirror cube having a first digital micromirror device (DMD), providing an s-polarization beam to a second mirror cube having a second DMD, and reflecting the p-polarization beam off the first DMD and reflecting the s-polarization beam off the second DMD such that the p-polarization beam and the s-polarization beam are reflected towards a light altering device configured to produce a plurality of superimposed images on the substrate.
Claims16
A method for producing an image on a substrate, comprising:
- providing a p-polarization beam;
- providing an s-polarization beam;
- providing the p-polarization beam to a first mirror cube having a first digital micromirror device (DMD) configured to generate a first image;
- providing the s-polarization beam to a second mirror cube having a second DMD configured to generate a second image;
- and
- reflecting the p-polarization beam off the first DMD and reflecting the s-polarization beam off the second DMD such that the p-polarization beam and the s-polarization beam are reflected towards a light altering device configured to produce a plurality of superimposed images on a photoresist layer of the substrate.
A method for producing an image on a substrate, comprising:
- providing a p-polarization beam to a first mirror cube having a first digital micromirror device (DMD) configured to generate a first image, from a first light source;
- providing an s-polarization beam to a second mirror cube having a second DMD configured to generate a second image, from a second light source;
- and
- reflecting the p-polarization beam off the first DMD and reflecting the s-polarization beam off the second DMD such that the p-polarization beam and the s-polarization beam are reflected towards a light altering device configured to produce a plurality of superimposed images on a photoresist layer of the substrate.
Dependencies are inferred from the claim text.