Laser uniformly machining apparatus and method
AssigneeIndustrial Technology Research Institute
InventorsPin-Hao Hu, Mao-Chi Lin, Yu-Chung Lin, Min-Kai Lee
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AssigneeIndustrial Technology Research Institute
InventorsPin-Hao Hu, Mao-Chi Lin, Yu-Chung Lin, Min-Kai Lee
Estimating the term…
A laser uniformly machining apparatus and method thereof are provided. The apparatus includes a laser unit, a shaping element, a collimating element, a scaling element and a focusing element. The laser unit provides a laser beam for machining. The shaping element shapes the laser beam into an annular beam. The collimating element modifies the direction of the annular beam in accordance with the direction of an optical axis to turn the annular beam into a collimated annular beam. The scaling element adjusts the collimated annular beam in accordance with a scaling ratio to produce a scaled annular beam. The focusing element focuses the scaled annular beam. The scaled annular beam is produced by the scaling element to form a focused beam having a uniformly distribution of light intensity in the direction of the optical axis.
A laser uniformly machining apparatus, comprising:
A laser uniformly machining method, comprising:
Dependencies are inferred from the claim text.