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US 10,705,329 B2Granted
Electro-mechanical designs for MEMS scanning mirrors
AssigneeNorth Inc.
InventorsJulien Gamet, Alexandre Fotinos, Nicholas Abele
Life of this patent
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Abstract
Electro-mechanical designs for MEMS scanning mirrors are described. In various embodiments, a driving coil may be situated on a reflective portion of a MEMS mirror. In some embodiments, a sensing coil may be situated partially or entirely on an outer frame portion of the MEMS mirror. Other embodiments are described and claimed.
Claims16
An apparatus, comprising:
- a frame;
- a reflective surface coupled to a portion of the frame, the reflective surface to receive a light beam from a light source;
- a driving coil coupled to the frame, the driving coil to receive a first electric current to induce movement of at least the portion of the frame about a first axis, the movement to scan the light beam across a projection surface;
- a sensing coil coupled to the frame, the movement to induce a second electric current in the sensing coil, wherein the second electric current indicates a position of the portion of the frame about the first axis;
- an outer frame disposed at least partially around the frame;
- and an outer driving coil coupled to the outer frame, the outer driving coil to receive a third electric current to induce second movement of at least the portion of the frame about a second axis.
3 more elements
A system comprising:
- a light source to emit a light beam;
- and
- a microelectromechanical system (MEMS), the MEMS comprising:
- a frame;
- a reflective surface coupled to the frame and arranged to receive the light beam;
- a driving coil coupled to the frame, the driving coil to receive a first electric current to induce movement of the reflective surface;
- a sensing coil coupled to the frame, the movement to induce a second electric current in the sensing coil;
- an outer frame disposed at least partially around the frame;
- and
- an outer driving coil coupled to the outer frame, the outer driving coil to receive a third electric current to induce second movement of at least the portion of the frame about a second axis.
7 more elements
Dependencies are inferred from the claim text.