Substrate integrated waveguide
AssigneeIntel Corporation
InventorsRobert Alan May, Kristof Darmawikarta, Rahul Jain, Sri Ranga Sai Boyapati, Maroun Moussallem, Rahul N. Manepalli, Srinivas Pietambaram
Life of this patent
Estimating the term…
Loading patent…
AssigneeIntel Corporation
InventorsRobert Alan May, Kristof Darmawikarta, Rahul Jain, Sri Ranga Sai Boyapati, Maroun Moussallem, Rahul N. Manepalli, Srinivas Pietambaram
Estimating the term…
This document discusses, among other things, a waveguide including a first metal having an outer surface proximate a dielectric material and an inner surface defining a path of the waveguide, a method of receiving an optical signal at the inner surface of the waveguide and transmitting the optical signal along at least a portion of the path of the waveguide. A method of integrating a waveguide in a substrate includes depositing sacrificial metal on a first surface of a carrier substrate to form a core of the waveguide, depositing a first metal over the sacrificial metal and at least a portion of the first surface of the carrier substrate, forming an outer surface of the waveguide and a conductor separate from the sacrificial metal, and depositing dielectric material over the first surface of the carrier substrate about the conductor.
An optical signal transmission system, comprising:
An optical signal transmission method, comprising:
Dependencies are inferred from the claim text.