Gap fill of imprinted structure with spin coated high refractive index material for optical components

A method, comprising:

• forming a first layer having a first refractive index ranging from about 1.1 to about 1.5 on a first surface of a substrate;
• pressing a stamp having a pattern onto the first layer;
• transferring the pattern to the first layer to form a patterned first layer;
• forming a second layer having a second refractive index ranging from about 1.7 to about 2.4 on the patterned first layer by spin coating;
• and
• forming a third layer having a third refractive index on a second surface of the substrate, the second surface being opposite the first surface of the substrate.

A method, comprising:

• forming a first layer having a first refractive index on a first surface of a substrate;
• pressing a first stamp having a first pattern onto the first layer;
• transferring the first pattern to the first layer to form a patterned first layer;
• forming a second layer having a second refractive index ranging from about 1.7 to about 2.4 on the patterned first layer by spin coating, the second layer comprising a metal oxide;
• and
• forming a third layer having a third refractive index on a second surface of the substrate, the second surface being opposite the first surface of the substrate.