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US 10,705,259 B2Granted
Optical element, method for manufacturing optical element, optical system, and optical apparatus
AssigneeCanon Kabushiki Kaisha
InventorKazue Uchida
Life of this patent
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Abstract
An optical element includes a substrate, and an antireflection film formed on the substrate and including a plurality of layers. The optical element satisfies predetermined conditions.
Claims15
An optical element comprising:
- a substrate;
- and
- an antireflection film formed on the substrate and including a plurality of layers,
- wherein the following conditions are satisfied:
- 1.10≤nm≤1.30
- when λ=430, (a−1.25)2+(b−0.28)2≤0.452
- when λ=1000, (a−1.34)2+(b+0.28)2≥0.302
- when λ=1800, (a−1.14)2+(b+0.24)2≤0.302
- where nm is a refractive index for a wavelength λ (nm) of a top layer most distant from the substrate among the plurality of layers, and a base layer except the top layer among the plurality of layers has an optical admittance of Y=a+ib.
6 more elements
A manufacturing method of an optical element that includes a substrate, and an antireflection film formed on the substrate and including a plurality of layers, the manufacturing method comprising the steps of:
- producing a base layer except a top layer most distant from the substrate among the plurality of layers;
- and
- producing the top layer among the plurality of layers,
- wherein the following conditions are satisfied:
- 1.10≤nm≤1.30
- when λ=430, (a−1.25)2+(b−0.28)2≤0.452
- when λ=1000, (a−1.34)2+(b+0.28)2≥0.302
- when λ=1800, (a−1.14)2+(b+0.24)2≤0.302
- where nm is a refractive index for a wavelength λ (nm) of the top layer, and the base layer has an optical admittance of Y=a+ib.
6 more elements
Dependencies are inferred from the claim text.