Imaging panel
AssigneeSharp Kabushiki Kaisha
InventorHiroyuki Moriwaki
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Abstract
The invention achieves preventing from moisture penetration into an imaging panel without deterioration in detection accuracy of scintillation light. An imaging panel includes an active matrix substrate having a plurality of pixels each provided with a photoelectric conversion element, a scintillator provided on a surface of the active matrix substrate, a damp-proof material covering the active matrix substrate and the scintillator, and an adhesive layer bonding the damp-proof material to the scintillator and the active matrix substrate. The active matrix substrate includes a first flattening film overlapped in a planar view with the scintillator and configured as a photosensitive resin film. The first flattening film is entirely disposed, in a planar view, inside an adhesive layer region provided with the adhesive layer.
Claims11
An imaging panel comprising:
- an active matrix substrate having a pixel region provided with a plurality of pixels each including a photoelectric conversion element;
- a scintillator provided on a surface of the active matrix substrate and configured to convert an X-ray to scintillation light;
- a damp-proof material covering the active matrix substrate and the scintillator;
- and
- an adhesive layer bonding the damp-proof material to the scintillator and the active matrix substrate;
- wherein
- the active matrix substrate includes
- a first flattening film provided to be overlapped in a planar view with the scintillator and configured as a photosensitive resin film, and
- the first flattening film is entirely disposed, in a planar view, inside an adhesive layer region provided with the adhesive layer.
Dependencies are inferred from the claim text.