Array substrate for digital X-ray detector, digital X-ray detector including the same, and method for manufacturing the same

A method for manufacturing an array substrate for a digital X-ray detector, comprising:

• forming an active layer, that includes not only a channel region but also a source region and a drain region respectively formed at one side and the other side based on the channel region, over a base substrate, and forming a gate insulation layer and a gate electrode over the active layer corresponding to the channel region;
• forming an interlayer insulation layer that covers the gate electrode and the drain electrode and includes a first contact hole corresponding to the drain region;
• forming a drain electrode being connected to the drain region through the first contact hole over the interlayer insulation layer, and forming a lower electrode over the source region such that the lower electrode is in surface contact with the active layer;
• forming a PIN diode including a PIN layer and an upper electrode over the lower electrode;
• and
• forming a protective layer having a second contact hole over the PIN diode, and forming a bias electrode, that is connected to the upper electrode through the second contact hole, over the protective layer,
• wherein:
• some regions of the lower electrode are formed over the source region of the active layer;
• and
• the remaining region of the lower electrode is formed over the same layer as the active layer.