X-ray inspection device
AssigneesSharp Kabushiki Kaisha, National Institute of Advanced Industrial Science and Technology
InventorsHiroaki Miyoshi, Takeshi Fujiwara, Hidetoshi Kato, Ryoichi Suzuki
Life of this patent
Estimating the term…
Abstract
An x-ray inspection device includes an x-ray irradiation unit that irradiates an object for inspection with an x-ray; a sensor that detects an electric signal corresponding to a back-scattered x-ray reflected off the object for inspection; a measurement unit that measures the object for inspection with reference to the electric signal output by the sensor; and a heavy metal plate having a pinhole that allows the back-scattered x-ray to pass therethrough, the pinhole forming an image of the back-scattered x-ray on the sensor.
Claims6
An x-ray inspection device, comprising:
- an x-ray irradiation unit that irradiates an object for inspection with an x-ray;
- an x-ray detector that detects an electric signal corresponding to a back-scattered x-ray reflected off the object for inspection;
- a measurement unit that measures the object for inspection with reference to the electric signal detected by the x-ray detector;
- an open member that has an opening that allows the back-scattered x-ray to pass therethrough, the opening forming an image of the back-scattered x-ray on the x-ray detector;
- and
- filters that are disposed on upstream and downstream sides, respectively, of the open member in a travel direction of the back-scattered x-ray, each of the filters allowing an x-ray having a predetermined amount of energy to transmit therethrough.
Dependencies are inferred from the claim text.