Method of inspecting foreign substance on substrate

A method of inspecting a foreign substance on a substrate, the method comprising:

• obtaining 3-dimensional information based on height of a substrate by using at least one grid pattern light;
• detecting a foreign substance of the substrate by using the 3-dimensional information based on height;
• obtaining 2-dimensional information of the substrate per color by using a plurality of color light;
• detecting a foreign substance of the substrate by using the 2-dimensional information per color;
• and
• merging a detection result of a foreign substance, performed by using the 3-dimensional information based on height and a detection result of a foreign substance, performed by using the 2-dimensional information per color,
• before detecting a foreign substance of the substrate by using the 3-dimensional information based on height and detecting a foreign substance of the substrate by using the 2-dimensional information per color, further comprising:
• obtaining a mask information regarding the substrate by using an infrared lighting, wherein the mask information includes an object that is wrongly inspectable as a foreign substance;
• forming a mask based on the mask information;
• and
• excluding the mask from an inspection target for detecting a foreign substance, to obtain a final inspection target.

A method of inspecting a foreign substance on a substrate, the method comprising:

• obtaining 3-dimensional information based on height of a substrate by using at least one grid pattern light;
• detecting a foreign substance of the substrate by using the 3-dimensional information based on height;
• obtaining 2-dimensional information of the substrate per color by using a plurality of color light;
• detecting a foreign substance of the substrate by using the 2-dimensional information per color;
• and
• merging a detection result of a foreign substance, performed by using the 3-dimensional information based on height and a detection result of a foreign substance, performed by using the 2-dimensional information per color,
• wherein at least one of detecting a foreign substance of the substrate by using the 3-dimensional information based on height, and detecting a foreign substance of the substrate by using the 2-dimensional information per color, comprising:
• displaying an image information of the substrate before applying solder;
• image-capturing at least one inspection region on the substrate to obtain an image of the inspection region that is image-captured;
• renewing the image information that is displayed with the image of the inspection region that is obtained to display a renewed image;
• and
• comparing the image of the inspection region and a reference image of the substrate to inspect a foreign substance.