Method for manufacturing biochip having improved fluorescent signal sensing properties and biochip manufactured by the same

A biochip having improved fluorescent signal sensing properties, comprising:

• a bio-layer embedded with light emitting devices each of which has a metal wiring layer lying thereunder, and formed with a plurality of reaction regions each of which a biochemical reaction between a reference sample and a target sample to take place;
• a filter layer formed under the bio-layer;
• and
• a light sensor layer which is formed under the filter layer, and in which a plurality of light sensing units are formed,
• wherein the filter layer is formed by planarizing an upper portion of the light sensor layer and stacking nanoscale thin films through an atomic layer deposition (ALD) process, and light emitted from each of the light emitting devices is blocked from being incident on the corresponding light sensing unit,
• wherein the light sensor layer further comprises:
• an image signal processor configured for analyzing and processing a signal output from the bio-layer, and
• wherein the filter layer comprises:
• a color filter layer formed over the planarized light sensor layer;
• an overcoating and passivation layer formed over the color filter layer;
• a fluorescent-excitation-light band-reject-filter layer formed over the overcoating and passivation layer;
• and
• an insulation film layer formed by stacking nanoscale oxide or nitride thin films over the fluorescent-excitation-light hand-reject-filter layer.