Pressure sensor
AssigneeAzbil Corporation
InventorsYuki Seto, Masayuki Yoneda, Yoshiyuki Ishikura, Tomohisa Tokuda, Rina Ogasawara
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AssigneeAzbil Corporation
InventorsYuki Seto, Masayuki Yoneda, Yoshiyuki Ishikura, Tomohisa Tokuda, Rina Ogasawara
Estimating the term…
A pressure sensor according to the present invention includes a diaphragm (3) including a first principal surface (3A) and a second principal surface (3B) that is opposite thereto, the first principal surface receiving a pressure of a fluid; a semiconductor chip (1) provided with resistors that constitute a strain gauge; and at least three support members (2a, 2b, 2c) made of an insulating material, each support member being fixed to the second principal surface at one end thereof and to the semiconductor chip at the other end thereof and extending perpendicularly to the second principal surface so as to support the semiconductor chip. One of the support members (2a) is provided at a center (30) of the diaphragm in plan view. At least two of the other support members (2b, 2c) are provided at positions point-symmetrical about the center of the diaphragm in plan view in a region in which the diaphragm is deformed when a pressure greater than a pressure applied to the second principal surface is applied to the first principal surface.
A pressure sensor, comprising:
Dependencies are inferred from the claim text.