Electromagnetic induction type displacement detection apparatus and measuring instrument using the same
AssigneeMitutoyo Corporation
InventorHiroto Kubozono
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AssigneeMitutoyo Corporation
InventorHiroto Kubozono
Estimating the term…
Provided is an electromagnetic induction type displacement detection apparatus in which influence of a change in magnetic flux received by a receiving device can be suppressed. An electromagnetic induction type displacement detection apparatus 1 includes a scale including a scale coil and a head 3 relatively moving with respect to the scale. The head 3 includes a transmitting device 4 that generates magnetic flux in the scale coil, and a receiving device 5 that includes a first receiving unit 51 and a second receiving unit 52 each receiving the change in the magnetic flux and in which the first receiving unit 51 and the second receiving unit 52 are arranged to be shifted from each other along a measurement direction. The receiving device 5 includes one end portion 10a and another end portion 10b in which a density of a plurality of receiving coils 500 is made sparse, and a central portion 11 that is positioned between the one end portion 10a and the other end portion 10b and in which the density of the plurality of receiving coils 500 is made dense. The electromagnetic induction type displacement detection apparatus 1 includes the one end portion 10a and the other end portion 10b and the central portion 11, whereby influence of the change in the magnetic flux received by the receiving device 5 can be suppressed.
An electromagnetic induction type displacement detection apparatus comprising:
Dependencies are inferred from the claim text.