MEMS rotation rate sensor including combined driving and detection

A rotation rate sensor, comprising:

• a substrate;
• at least one structure movable with respect to the substrate, the structure being excitable from a neutral position of the structure, into an oscillation having a movement component substantially parallel to a driving direction to induce the oscillation, the rotation rate sensor including at least one moving comb electrode moved along with the structure and at least one stationary comb electrode fixed in position relative to the substrate, the excitation being able to be effected by applying voltage to at least one of the moving comb electrode, and the stationary comb electrode, wherein the moving comb electrode and the stationary comb electrode are formed in such a manner that, due to a rotation rate of the rotation rate sensor about an axis running substantially perpendicularly to the driving direction and substantially perpendicularly to a detection direction, a force, which is applied to the structure and includes a force component along a detection direction substantially perpendicular to the driving direction, is detectable, wherein the moving comb electrode includes at least one first electrode, the stationary comb electrode including at least one second electrode and at least one third electrode;
• and
• at least one of:
• (i) a first change in capacitance between the first electrode and the second electrode, and (ii) a second change in capacitance between the first electrode and the third electrode are measurable in such a manner, that the force applied to the structure is detectable with the aid of at least one of the first change in capacitance and the second change in capacitance.