Shape measuring device and shape measuring method

A shape measuring device comprising:

• a stage on which a measurement object is placed;
• a light projecting section configured to irradiate pattern light on the measurement object placed on the stage;
• a light receiving section configured to receive the pattern light irradiated from the light projecting section and reflected from the measurement object and output light reception data;
• an optical-axis-direction driving section configured to relatively move the stage in an optical axis direction with respect to the light receiving section to thereby adjust a focal position of the light receiving section;
• a stage-plane-direction driving section configured to relatively move the stage in a stage plane direction orthogonal to an optical axis direction of the light receiving section;
• a coupled-region setting section configured to set, as a region where a relative position of the stage in the stage plane direction is moved by the stage-plane-direction driving section, a coupled region formed by a plurality of partial regions;
• a stereoscopic-shape-data generating section configured to generate, in the partial regions set by the coupled-region setting section, according to the measurement setting set by the measurement setting section, on the basis of the light reception data output by the light receiving section, stereoscopic shape data indicating a shape of the measurement object with a pattern projection method;
• a measurement setting section for setting, as partial region measurement setting, for each of the partial regions, measurement setting including light projection setting for the pattern light of the light projecting section and light reception setting for a pattern image of the light receiving section;
• a measurement-setting saving section for saving, in association with the partial regions, partial region measurement setting for the partial regions set by the measurement setting section;
• and
• a stereoscopic-shape-data coupling section configured to couple, according to the measurement setting for the partial regions saved in the measurement-setting saving section, the stereoscopic shape data of the partial regions generated again by the stereoscopic-shape-data generating section and generate coupled stereoscopic shape data corresponding to the coupled region.

A shape measuring method for performing measurement of a shape of a measurement object, the shape measuring method comprising:

• dividing an image showing a measurement object placed on a stage into a plurality of partial regions and relatively moving the stage with a stage-plane-direction driving section in a stage plane direction orthogonal to an optical axis direction of a light receiving section to a first region, which is one of the plurality of divided partial regions;
• projecting pattern light on the measurement object from a light projecting section according to first region measurement setting, which is measurement setting including light projection setting for the pattern light of the light projecting section and light reception setting of the light receiving section in the first region, receiving the pattern light reflected from the measurement object with the light receiving section and acquiring first light reception data, and generating, on the basis of the first light reception data, with a stereoscopic-shape-data generating section, first stereoscopic shape data indicating a shape of the first region with a pattern projection method;
• saving the first stereoscopic shape data or the first light reception data in a storing section in association with the first region and automatically adjusting, with a measurement-setting automatically adjusting section, the first region measurement setting to optimized first region adjusted measurement setting on the basis of the first stereoscopic shape data or the first light reception data;
• relatively moving the stage with a stage-plane-direction driving section to a second region, which is another one of the partial regions;
• projecting the pattern light on the measurement object from the light projecting section according to second region measurement setting, which is measurement setting including light projection setting for the pattern light of the light projecting section and light reception setting of the light receiving section in the second region, receiving the pattern light reflected from the measurement object with the light receiving section and acquiring second light reception data, and generating, on the basis of the second light reception data, with the stereoscopic-shape-data generation processing, second stereoscopic shape data indicating a shape of the second region with the pattern projection method;
• saving the second stereoscopic shape data or the second light reception data in the storing section in association with the second region and automatically adjusting, with a control section, the second region measurement setting to optimized second region adjusted measurement setting on the basis of the second stereoscopic shape data or the second light reception data;
• and
• coupling, according to a positional relation among the partial regions, a plurality of stereoscopic shape data including the first stereoscopic shape data and the second stereoscopic shape data saved in the storing section and generating, with a stereoscopic-shape-data coupling section, coupled stereoscopic shape data corresponding to the coupled region.