Stator-side member and vacuum pump
AssigneeEdwards Japan Limited
InventorsYoshiyuki Sakaguchi, Akihiro Ito, Yoshinobu Ohtachi, Yasushi Maejima, Tsutomu Takaada
Life of this patent
Estimating the term…
Loading patent…
AssigneeEdwards Japan Limited
InventorsYoshiyuki Sakaguchi, Akihiro Ito, Yoshinobu Ohtachi, Yasushi Maejima, Tsutomu Takaada
Estimating the term…
The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer. Specifically, this material has a coefficient of thermal conductivity lower than that of aluminum or aluminum alloy, and is preferably any one of stainless steel, fiber-reinforced plastic, polyetherimide, and polyetheretherketone. (2) The threaded groove spacer is constituted by at least two or more parts.
A stator-side member used in a first gas transfer mechanism of a vacuum pump, the vacuum pump comprising:
A vacuum pump, comprising:
A vacuum pump, comprising:
A vacuum pump, comprising:
Dependencies are inferred from the claim text.