Toroidal plasma processing apparatus with a shaped workpiece holder
AssigneePlasmability, LLC
InventorsWilliam Holber, Robert J. Basnett
Life of this patent
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Abstract
A plasma processing apparatus includes a toroidal-shape plasma vessel comprising a process chamber. A magnetic core surrounds a portion of the toroidal-shape plasma vessel. An RF power supply having an output that is electrically connected to the magnetic core energizes the magnetic core, thereby forming a toroidal plasma loop discharge in the plasma chamber. A workpiece holder is positioned in the toroidal-shape plasma vessel and includes at least one face. A plasma guiding structure is shaped and dimensioned so as to constrain a section of plasma in the toroidal plasma loop to travel substantially perpendicular to a normal to the at least one face.
Claims25
A plasma processing apparatus comprising:
- a) a toroidal-shape plasma vessel comprising a process chamber;
- b) a magnetic core surrounding a portion of the toroidal-shape plasma vessel;
- c) a plurality of gas inlet ports positioned in the toroidal-shape plasma vessel;
- d) an RF power supply having an output that is electrically connected to the magnetic core, the RF power supply energizing the magnetic core, thereby forming a toroidal plasma loop discharge in the toroidal-shape plasma vessel;
- e) a workpiece holder comprising at least one face that supports a workpiece;
- and
- f) an outlet positioned in the toroidal-shape plasma vessel and being coupled to a vacuum pump, the outlet being positioned near the workpiece holder, the relative positions of at least one of the plurality of gas inlet ports and the outlet to the workpiece holder being configured to provide a desired gas flow pattern that enhances uniformity of deposition across the workpiece.
A method for growing single-crystal diamond material, the method comprising:
- a) providing a toroidal-shape plasma vessel comprising a process chamber having a workpiece holder comprising at least one face that supports a workpiece during growth;
- b) positioning a magnetic core surrounding a portion of the toroidal-shape plasma vessel;
- c) providing gas to the toroidal-shape plasma vessel at a plurality of positions;
- d) providing vacuum to an outlet in the toroidal-shape plasma vessel at a position near the workpiece holder;
- and
- e) energizing the magnetic core with RF radiation, thereby forming a toroidal plasma loop discharge in the toroidal-shape plasma vessel, wherein the gas provided to the toroidal-shape plasma vessel at the plurality of positions and the vacuum provided to the outlet in the toroidal-shape plasma vessel provide a gas flow pattern that enhances uniformity of the grown single-crystal diamond material across the workpiece.
Dependencies are inferred from the claim text.