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US 10,704,144 B2Granted
Apparatus and method for printing multilayer organic thin films from vapor phase in an ultra-pure gas ambient
AssigneeUniversal Display Corporation
InventorsGregory McGraw, William E. Quinn, Gregg Kottas, Siddharth Harikrishna Mohan, Matthew King
Life of this patent
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Abstract
Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.
Claims11
An organic printing deposition system, comprising:
- a print head comprising:
- a nozzle block comprising a delivery aperture, the delivery aperture being in fluid communication with a source of organic material to be deposited on a substrate by the printing deposition system, and one or more exhaust apertures;
- one or more shield gas distribution channels, each shield gas distribution channel being disposed in a leading position or a trailing position of the delivery aperture when viewed from the substrate;
- a first array of shield gas apertures that are separate from and disposed adjacent to a first side of the nozzle block, and a second array of shield gas apertures that are separate from and disposed adjacent to a second side of the nozzle block, wherein the first array of shield gas apertures and the second array of shield gas apertures are respectively coupled to the one or more shield gas distribution channels, and wherein the nozzle block includes the delivery aperture and the one or more exhaust apertures;
- and
- the one or more exhaust apertures are disposed adjacent to the delivery aperture such that, during operation of the print head, non-condensing gas flow generated by the delivery aperture is captured by the one or more exhaust apertures,
- wherein the delivery aperture, the first array of shield gas apertures, and the second array of shield gas apertures are configured so that the gas flow generated by the delivery aperture during operation mixes with shield gas flow output from the first array of shield gas apertures and the second array of shield gas apertures,
- a chiller plate disposed between the print head and the substrate that includes a window through which the print head protrudes, wherein the first array of shield gas apertures are located on the chiller plate and spaced in a first direction from the window, and wherein the second array of shield gas apertures are located on the chiller plate and are spaced in a second direction from the window,
- wherein each of the first array of shield gas apertures and the second array of shield gas apertures is arranged to provide a flow of shield gas that prevents material from a chamber ambient in which the print head is operated from reaching the exhaust apertures of the nozzle block, wherein the shield gas is purified so that water and oxygen levels of the shield gas are less than 0.001 parts-per-million (ppm) prior to being output in a deposition chamber of the printing deposition system, and
- wherein the print head is moveable in a direction of a substrate normal, independently of other components of the organic printing deposition system.
7 more elements
An organic printing deposition system, comprising:
- a print head comprising:
- a nozzle block comprising a delivery aperture, the delivery aperture being in fluid communication with a source of organic material to be deposited on a substrate by the printing deposition system, and one or more exhaust apertures;
- one or more shield gas distribution channels, each shield gas distribution channel being disposed in a leading position or a trailing position of the delivery aperture when viewed from the substrate;
- a first array of shield gas apertures that are separate from and disposed adjacent to a first side of the nozzle block, and a second array of shield gas apertures that are separate from and disposed adjacent to a second side of the nozzle block, wherein the first array of shield gas apertures and the second array of shield gas apertures are respectively coupled to the one or more shield gas distribution channels, and wherein the nozzle block includes the delivery aperture and the one or more exhaust apertures;
- additional one or more shield gas apertures respectively coupled to the one or more shield gas distribution channels that are separate from the print head;
- and
- the one or more exhaust apertures are disposed adjacent to the delivery aperture such that, during operation of the print head, non-condensing gas flow generated by the delivery aperture is captured by the one or more exhaust apertures,
- wherein the delivery aperture, the first array of shield gas apertures, and the second array of shield gas apertures are configured so that the gas flow generated by the delivery aperture during operation mixes with shield gas flow output from the first array of shield gas apertures and the second array of shield gas apertures,
- a chiller plate disposed between the print head and the substrate that includes a window through which the print head protrudes, wherein the first array of shield gas apertures are located on the chiller plate and spaced in a first direction from the window, and wherein the second array of shield gas apertures are located on the chiller plate and are spaced in a second direction from the window,
- wherein each of the first array of shield gas apertures and the second array of shield gas apertures is arranged to provide a flow of shield gas that prevents material from a chamber ambient in which the print head is operated from reaching the exhaust apertures of the nozzle block, wherein the shield gas is purified so that water and oxygen levels of the shield gas are less than 0.001 parts-per-million (ppm) prior to being output in a deposition chamber of the printing deposition system, and wherein the print head is moveable in a direction of a substrate normal, independently of other components of the organic printing deposition system.
7 more elements
Dependencies are inferred from the claim text.