Quick disconnect resistance temperature detector assembly for rotating pedestal

A quick disconnect resistance temperature detector (RTD) heater assembly, comprising:

• a first assembly including a plurality of heater power supply terminals and at least one RTD, wherein the RTD includes an RTD sensor portion, a protective sleeve, and an RTD connector housing having a plurality of copper contact pads;
• and
• a second assembly including a cable assembling having a plurality of power supply sockets and a plurality of spring loaded RTD pins, wherein the cable assembly includes an RTD pin support disposed on a side of the cable assembly, and wherein the spring loaded RTD pins are supported by RTD pin support,
• wherein the first assembly is removably coupled to the second assembly, wherein the plurality of power supply sockets are configured to receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the plurality of spring loaded RTD pins contact the plurality of copper contact pads when the first and second assemblies are coupled together.

A process chamber including a rotatable substrate support heater pedestal, comprising:

• a chamber body having sidewalls, a bottom, and a removable lid assembly that encloses a process volume;
• and
• a quick disconnect resistance temperature detector (RTD) heater assembly comprising:
• a first assembly disposed including a plurality of heater power supply terminals and at least one RTD, wherein the first assembly is configured to be installed and removed from a top opening in the process chamber;
• and
• a second assembly including a cable assembling having a plurality of power supply sockets and a plurality of spring loaded RTD pins, wherein the second assembly is secured below the bottom of the chamber body, wherein the cable assembly includes an RTD pin support disposed on a side of the cable assembly, and wherein the spring loaded RTD pins are supported by RTD pin support,
• wherein the first assembly is removably coupled to the second assembly, wherein the plurality of power supply sockets are configured to receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the plurality of spring loaded RTD pins contact the at least one RTD when the first and second assemblies are coupled together.