Neon recovering/purifying system and neon recovering/purifying method

A neon recovering/purifying system that recovers and purifies neon from exhaust gas discharged from a manufacturing system including:

• a supply line that supplies mixed noble gas containing at least neon and first noble gas, at a first pressure;
• a laser apparatus that uses the mixed noble gas;
• and a discharge line that discharges at least exhaust gas discharged from the laser apparatus, at a second pressure that is equal to or higher than an atmospheric pressure and equal to or lower than the first pressure, the neon recovering/purifying system comprising:
• a recovery vessel that is arranged on an exhaust gas route and stores the exhaust gas, the exhaust gas route being branched and extending from the discharge line;
• a compressor that is arranged on an exhaust gas route downstream side of the recovery vessel and increases a pressure of the exhaust gas sent out from the recovery vessel, to a third pressure;
• an exhaust gas flow rate regulating unit that is arranged on the exhaust gas route downstream side of the compressor and regulates a flow rate of the exhaust gas that is sent to the exhaust gas route downstream side and whose pressure has been increased by the compressor;
• a first impurity removing unit that is arranged on the exhaust gas route downstream side of the exhaust gas flow rate regulating unit and removes a first impurity from the exhaust gas;
• a second impurity removing unit that is arranged on the exhaust gas route downstream side of the first impurity removing unit and removes a second impurity from the exhaust gas from which the first impurity has been removed;
• a pressure increasing vessel that is arranged on a purified gas route downstream side of the second impurity removing unit and stores purified gas that has been processed by the first impurity removing unit and the second impurity removing unit;
• pressure reducing means that is arranged on the purified gas route downstream side of the pressure increasing vessel and reduces a pressure of the purified gas sent out from the pressure increasing vessel, to the first pressure;
• and
• a purified gas flow rate regulating unit that is arranged on the purified gas route downstream side of the pressure reducing means and regulates a flow rate of the purified gas supplied to the supply line of the manufacturing system.