Microelectromechanical system (MEMS) apparatus with adjustable spring

A microelectromechanical system (MEMS) apparatus with adjustable spring, comprising:

• a central portion, comprising a center of mass;
• a heater, disposed on the central portion;
• a peripheral portion, surrounding the central portion and spaced apart from the central portion;
• and
• at least one spring, comprising:
• a central section, extending along an axis that passes through the center of mass, wherein the central section has an inner end and an outer end, and the inner end of the central section connects to the central portion;
• a peripheral section, extending along a direction parallel to the axis, wherein the peripheral section has an inner end and an outer end, and the outer end of the peripheral section connects to the peripheral portion;
• an outward extension section, having an inner end and an outer end;
• and
• an inner connection section, connecting to the inner end of the peripheral section and the inner end of the outward extension section respectively;
• wherein an amount of thermal expansion per unit temperature change of the outward extension section is greater than an amount of thermal expansion per unit temperature change of the peripheral section or greater than an amount of thermal expansion per unit temperature change of the central section.