Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof

A microfluidic device, comprising:

• a plurality of ejector elements, each ejector element including:
• a first portion having a first fluid flow channel and an opening;
• a second portion including:
• a membrane layer coupled to the first portion, the membrane layer covering the opening of the first portion and forming an actuator chamber;
• a membrane definition layer coupled to the membrane layer and having a membrane definition opening, the membrane definition opening defines a flexible membrane in the membrane layer, the membrane definition opening having a width in a plane of the membrane definition layer, wherein the plane of the membrane definition layer is parallel to a surface of the membrane layer that is exposed by the membrane definition opening;
• and
• a chamber defining body coupled to the membrane definition layer and having a chamber opening, wherein the chamber opening has, in a direction parallel to the plane, a width greater than the width of the membrane definition opening;
• a third portion coupled to the second portion, wherein the third portion, the membrane layer, and the chamber opening in the chamber defining body forms a fluid containment chamber, wherein the third portion includes a second fluid flow channel fluidically coupled to the fluid containment chamber;
• and
• an actuator located on the flexible membrane and in the actuator chamber.

A microfluidic device comprising:

• a plurality of ejector elements, each ejector element including:
• a first semiconductor body having a first fluid flow channel and an opening;
• a second semiconductor body coupled to the first semiconductor body, the second semiconductor body including a membrane layer, a membrane definition layer, and a main body having an opening, the membrane layer covering the opening of the first semiconductor body and forming an actuator chamber, the membrane layer including a flexible membrane at the actuator chamber, the membrane layer including a chamber opening in fluid communication with the first fluid flow channel and the opening, the chamber opening having a width that is less than a width of the first fluid flow channel, the membrane definition opening having a width in a plane of the membrane definition layer, wherein the plane of the membrane definition layer is parallel to a surface of the membrane layer that is exposed by the membrane definition opening;
• a third semiconductor body coupled to the second semiconductor body, wherein the third semiconductor body, the membrane layer, and the opening of the second semiconductor body form a fluid containment chamber, wherein the third semiconductor body includes a second fluid flow channel fluidically coupled to the fluid containment chamber;
• and
• an actuator located on the flexible membrane and in the actuator chamber.