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US 10,702,824 B2Granted
Abatement system
AssigneeEdwards Limited
InventorsGary Peter Knight, Andrew James Seeley, Duncan Michael Price
Life of this patent
Estimating the term…
Abstract
Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
Claims12
An abatement system for abating effluent gas evacuated from a processing chamber, the abatement system comprising:
- a liquid ring pump for compressing and pre-scrubbing gas evacuated from a processing chamber, the liquid ring pump comprising a gas inlet for receiving evacuated gas, a liquid inlet for receiving liquid for generating a liquid ring in a stator of the pump when a rotor rotates in the stator and a gas and liquid outlet for exhausting gas and liquid in a gas/liquid ratio;
- and
- a venturi scrubber comprising an inlet for receiving the gas and liquid mixture from the liquid ring pump, a conical inlet portion wherein the inlet is arranged to convey the gas and liquid mixture tangentially to the conical inlet portion such that the liquid portion of the mixture is forced to spin around an inside wall of the venturi scrubber, a nozzle, downstream of the conical inlet portion, through which the gas and liquid is conveyed for providing mixing of the gas with the liquid, and a liquid sump for collecting liquid conveyed through the nozzle and a gas outlet for exhausting gas from the venturi scrubber, the liquid ring pump being configured to exhaust gas and liquid at a pressure which drives the gas and liquid through the venturi scrubber and wherein the gas/liquid ratio of the effluent gas stream exhausted from the liquid ring pump is adapted to promote scrubbing by the venturi scrubber.
Dependencies are inferred from the claim text.