Photoresist composition and a method for forming a fine pattern using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJin Park, Hyunwoo Kim
Life of this patent
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Abstract
A photoresist composition includes a photosensitive polymer including a polymer chain and at least one first functional group coupled to the polymer chain, and a photoacid generator. The first functional group has a structure represented by the following Chemical Formula 1, where R1 is one of an alkyl group having a carbon number of 1 to 20 and an aryl group having a carbon number of 1 to 20, and R2 is one of —H, —F, —Cl, —Br, an alkyl group having a carbon number of 1 to 20, and an aryl group having a carbon number of 1 to 20.
Claims4
A photoresist composition, comprising:
- a photosensitive polymer including a polymer chain and at least one first functional group coupled to the polymer chain;
- and
- a photoacid generator,
- wherein the photosensitive polymer includes a structure represented by the following Chemical Formula 2 or the following Chemical Formula 3,
- where n is an integral number ranging from 1 to 1,000,000, R3 is one of —H and CH3, and R is represented by the following Chemical Formula 4,
- where R1 is one of an alkyl group having a carbon number of 1 to 20 and an aryl group having a carbon number of 1 to 20, and R2 is one of —H, —F, —Cl, —Br, an alkyl group having a carbon number of 1 to 20, and an aryl group having a carbon number of 1 to 20.
A photoresist composition, comprising:
- a photosensitive polymer including a polymer chain and a first functional group coupled to the polymer chain, and a photoacid generator, wherein:
- the photoacid generator generates acid ions (H+) when the photoacid generator is exposed to light, and
- the first functional group is convertible into a second functional group by a de-protection reaction using the acid ions (H+) as a catalyst, wherein the second functional group has a structure represented by the following Chemical Formula 8,
- where R1 is one of an alkyl group having a carbon number of 1 to 20 and an aryl group having a carbon number of 1 to 20, and R2 is one of —H, —F, —Cl, —Br, an alkyl group having a carbon number of 1 to 20, and an aryl group having a carbon number of 1 to 20, and wherein the polymer is hydrophilic when it contains the first functional group and hydrophobic when the first functional group is converted into the second functional group, and
- wherein the photosensitive polymer includes a structure represented by the following Chemical Formula 2 or the following Chemical Formula 3,
- where n is an integral number ranging from 1 to 1,000,000, R3 is one of —H and CH3, and R is represented by the following Chemical Formula 4,
- where R1 is one of an alkyl group having a carbon number of 1 to 20 and an aryl group having a carbon number of 1 to 20, and R2 is one of —H, —F, —Cl, —Br, an alkyl group having a carbon number of 1 to 20, and an aryl group having a carbon number of 1 to 20.
Dependencies are inferred from the claim text.