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US 10,689,754 B2Granted
Programmable charge storage arrays and associated manufacturing devices and systems
AssigneePeter C. Salmon
InventorPeter C. Salmon
Life of this patent
Estimating the term…
Abstract
A charge storage cell includes a substrate having a back side conductive layer or conductive element, a top side metal pad coupled to the substrate, and an insulating layer formed on the metal pad. The metal pad will support an electric charge injected through the insulating layer by a charged particle beam. A regular array of charge storage cells provides a charge storage array.
Claims15
A charge storage cell comprising:
- an insulating substrate having a back side and a top side opposite the back side;
- a back side conductive element coupled to the back side of the insulating substrate;
- a top side metal pad coupled to the top side of the insulating substrate;
- and
- an insulative layer covering the top side metal pad;
- wherein the top side metal pad is operable to support an electric charge injected through the insulative layer by a charged particle beam.
3 more elements
A charge storage cell comprising:
- a conductive substrate;
- a vertical post comprising a first insulating material coupled to the conductive substrate;
- a conductive cap coupled to the vertical post;
- and
- a top side planarizing layer comprising a second insulating material and covering the conductive cap;
- wherein the conductive cap is operable to support an electric charge injected through the top side planarizing layer by a modulated charged particle beam.
3 more elements
Dependencies are inferred from the claim text.