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US 10,685,830 B2Granted
Condenser system for high pressure processing system
AssigneeApplied Materials, Inc.
InventorJean Delmas
Life of this patent
Estimating the term…
Abstract
Embodiments described herein relate to a high pressure processing system with a condenser and methods for utilizing the same. The processing system includes a process chamber, a boiler, a condenser, and one or more heat exchangers. The boiler generates a fluid, such as a vapor or supercritical fluid, and delivers the fluid to the process chamber where a substrate is processed. After processing the substrate, the system is depressurized and the fluid is delivered to the condenser where the fluid is condensed.
Claims14
A substrate processing system, comprising:
- a process chamber;
- a boiler in fluid communication with the process chamber via a first conduit;
- a first valve disposed on the first conduit between the boiler and the process chamber;
- a condenser in fluid communication with the process chamber via a second conduit;
- a second valve disposed on the second conduit between the condenser and the process chamber;
- a heat exchanger in fluid communication with the condenser via a third conduit;
- and
- a third valve disposed on the third conduit between the condenser and the heat exchanger, further comprising a second heat exchanger disposed on the second conduit between the process chamber and the condenser.
5 more elements
A substrate processing system, comprising:
- a process chamber;
- a boiler in fluid communication with the process chamber via a first conduit;
- a first valve disposed on the first conduit between the boiler and the process chamber;
- a condenser in fluid communication with the process chamber via a second conduit;
- a second valve disposed on the second conduit between the condenser and the process chamber;
- a first heat exchanger disposed on the second conduit between the process chamber and the condenser;
- a fluid collection unit in fluid communication with the condenser via a third conduit;
- a second heat exchanger disposed on the third conduit between the condenser and the fluid collection unit;
- and
- a third valve disposed on the third conduit between the condenser and the second heat exchanger.
7 more elements
Dependencies are inferred from the claim text.