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US 10,674,592 B2Granted
Plasma generation apparatus
AssigneeElectronics and Telecommunications Research Institute
InventorYark Yeon Kim
Life of this patent
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Abstract
Provided is a plasma generation apparatus including: a housing in which a window is defined at one side in a first direction; a stick type plasma source provided in the housing to generate plasma toward the window; and a driving unit coupled to the plasma source to allow one end of the plasma source to perform a reciprocating movement in a second direction that is a longitudinal direction of the window.
Claims10
A plasma generation apparatus comprising:
- a housing in which a window is defined at one side in a first direction;
- a stick type plasma source provided in the housing to generate a plasma toward the window;
- and
- a driving unit coupled to the plasma source to allow one end of the plasma source to perform a reciprocating movement in a second direction that is a longitudinal direction of the window.
1 more element
Dependencies are inferred from the claim text.