Resonance device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYuichi Goto, Wakana Hirota
Life of this patent
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Abstract
A resonance device is provided with a reduced size and also suppresses the occurrence of deformation and breakage during operation. The resonance device includes a lower substrate, an upper substrate that defines a vibration space between the lower substrate and the upper substrate, a protruding portion that is formed on an inner surface of the lower or upper substrates. Moreover, a resonator is disposed in the vibration space and includes a base portion and vibration arms that extend in parallel to one another from the base portion along the inner surface of the lower substrate or the inner surface of the upper substrate and that vibrate in a vertical direction toward the inner surface of the lower substrate or the inner surface of the upper substrate.
Claims17
A resonance device comprising:
- a lower substrate and an upper substrate that define a vibration space therebetween;
- a protruding member disposed on an inner surface of one of the lower substrate or the upper substrate and that protrudes in the vibration space;
- and
- a resonator disposed in the vibration space and including a base and a plurality of vibration arms that extend in parallel to each other from the base,
- wherein each of the plurality of vibration arms is configured to vibrate in an out-of-plane bending vibration mode in a vertical direction of the resonator device towards at least one of the inner surface of the lower substrate and the inner surface of the upper substrate
- wherein the plurality of vibration arms comprises four vibration arms with the protruding member facing a gap between an inner two of the four vibration arms, which are disposed between an outer two of the four vibration arms,
- wherein the gap between the inner two vibration arms has a width that is equal to or larger than a width of a gap between one of the outer vibration arms and the adjacent inner vibration arm, and
- wherein each of the four vibration arms comprises first and second electrodes with a piezoelectric layer disposed therebetween, with the first and second electrodes of each vibration arm setting an electric field for the inner two vibration arms to be opposite of an electric field of the outer two vibration arms, such that the inner two vibration arms are displaced in a same direction as each other and in an opposite direction as the outer two vibration arms.
A resonance device comprising:
- a lower substrate and an upper substrate that define a vibration space therebetween, the lower and upper substrates each comprising a rectangle shape with a pair of first sides and a pair of second sides perpendicular to the first sides that have a shorter length than the first sides;
- a protruding member disposed on an inner surface of one of the lower substrate or the upper substrate and that protrudes in the vibration space, the protruding member having a length extending in a first direction parallel to the first sides of each of the upper and lower substrates;
- and
- a resonator disposed in the vibration space and including a base and a plurality of vibration arms that extend in parallel to each other from the base in the first direction,
- wherein each of the plurality of vibration arms is configured to vibrate in an out-of-plane bending vibration mode in a vertical direction of the resonator device towards at least one of the inner surface of the lower substrate and the inner surface of the upper substrate, and
- wherein the plurality of vibration arms each comprise first and second electrodes with a piezoelectric layer disposed therebetween, with the first and second electrodes of each vibration arm setting an electric field for an inner pair of the vibration arms to be opposite of an electric field of an outer pair of the vibration arms, such that the pair is displaced in a same direction as each other and in an opposite direction as the outer pair of vibration arms.
Dependencies are inferred from the claim text.