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US 10,670,963 B2Granted
Salt and photoresist composition containing the same
AssigneeSumitomo Chemical Company, Limited
InventorsTatsuro Masuyama, Satoshi Yamaguchi, Koji Ichikawa
Life of this patent
Estimating the term…
Abstract
A salt represented by the formula (I). wherein Z+, Q1, Q2, R1, R2, R3, R4, R5, Z, X1, X2, Xa, Xb, L1, L2, L3 and L4 are defined in the specification.
Claims7
A salt represented by the formula (I):
- wherein Q1 and Q2 independently each represent a fluorine atom or a C1-C6 perfluoroalkyl group,
- R1 and R2 independently each represent a hydrogen atom, a fluorine atom or a C1-C6 perfluoroalkyl group,
- z represents an integer of 0 to 6,
- X1 and X2 independently each represent *—CO—O—, *—O—CO—, —O—CO—O— or —O—, where * represents a binding potion to —C(R1)(R2)—, —C(Q1)(Q2)- or L4,
- L1 represents a C1-C28 divalent saturated hydrocarbon group in which a methylene group can be replaced by —O—, —S—, —CO— or —S(O)2— and in which a hydrogen atom can be replaced by a fluorine atom or a hydroxyl group,
- L2, L3 and L4 independently each represent a single bond or a C1-C6 alkanediyl group,
- Xa and Xb independently each represent an oxygen atom or a sulfur atom,
- R3 and R4 independently each represent a C1-C6 alkyl group, or represent a C5-C12 alicyclic hydrocarbon ring together with a carbon atom bonded to R3 and R4,
- R5 represents a hydrogen atom, a hydroxyl group, a halogen atom or a C3-C24 cyclic hydrocarbon group in which a hydrogen atom can be replaced by a substituent and in which a methylene group can be replaced by —O—, —S—, —CO— or —S(O)2—, and
- Z+ represents an organic cation.
7 more elements
Dependencies are inferred from the claim text.